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Optical properties of TiO2-x thin films studied by spectroscopic ellipsometry: substrate temperature effect

著者名:
Camacho-Lopez, M. A. ( Univ. Autonoma del Estado de Mexico (Mexico) )
Sanchez-Perez, C. A. ( Univ. Nacional Autonoma de Mexico (Mexico) )
Esparza-Garcia, A. ( Univ. Nacional Autonoma de Mexico (Mexico) )
Ghibaudo, E. ( Univ. Nacional Autonoma de Mexico (Mexico) )
Rodil, S. ( Univ. Nacional Autonoma de Mexico (Mexico) )
Muhl, S. ( Univ. Nacional Autonoma de Mexico (Mexico) )
Escobar-Alarcon, L. ( Instituto Nacional de Investigaciones Nucleares (Mexico) )
さらに 2 件
掲載資料名:
RIAO/OPTILAS 2004: 5th Iberoamerican meeting on optics and 8th Latin American meeting on optics, lasers, and their applications: ICO regional meeting : 3-8 October 2004, Porlamar, Isla de Margarita, Venezuela
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5622
発行年:
2004
開始ページ:
545
終了ページ:
550
総ページ数:
6
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455758 [081945575X]
言語:
英語
請求記号:
P63600/5622-2
資料種別:
国際会議録

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