Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.653-658, 1990. Pittsburgh, Pa.. Materials Research Society
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.216-227, 1996. Pennington, NJ. Electrochemical Society
Proceedings of the Twenty-first State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXI). pp.96-107, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.1029-1040, 1994. Pennington, NJ. Electrochemical Society
Meng, H.L. ; Chen, J. ; Robinson, H.G. ; Law, M.E. ; Slinkman, J.A. ; Jones, K.S.
出版情報:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.236-242, 1993. Pennington, NJ. Electrochemical Society