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出版情報:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.361-366, 2003. Pennington, N.J.. Electrochemical Society
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ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.561-570, 1997. Pennington, NJ. Electrochemical Society
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シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering