Kavanagh, K. L. ; Morgan, B. A. ; Talin, A. A. ; Ring, K. M. ; Williams, R. S. ; Reuter, M. C. ; Tromp, R. M.
出版情報:
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.461-, 1996. Pittsburgh. MRS - Materials Research Society
McArthur, W. F. ; Ring, K. M. ; Morgan, B. ; Hurst, Q. ; Serber, D. ; Clark, A. ; Kavanagh, K. L.
出版情報:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.321-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Materials reliability in microelectronics V : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.327-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
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