Copper Removal from Chemical Mechanical Polishing Effluent
- 著者名:
- Riley, C. ( USFilter Recovery Services, Inc. )
- Filson, J. ( USFilter Recovery Services, Inc. )
- Mendicino, L. ( Motorola )
- Brown, P.T. ( Motorola )
- 掲載資料名:
- Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-7
- 発行年:
- 2000
- 開始ページ:
- 174
- 終了ページ:
- 184
- 総ページ数:
- 11
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772723 [1566772729]
- 言語:
- 英語
- 請求記号:
- E23400/2000-7
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
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5
国際会議録
Removal Rate, Uniformity and Defectivity Studies Of Chemical Mechanical Polishing of BPSG Films
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