1.

国際会議録
国際会議録
1. Measurement of the residual stresses of the handing structures used in MEMS
Rigo, S. ; Desmarres, J.M. ; Masri, T. ; Petit, J.A.
出版情報: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.704-713,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4755
2.

国際会議録
国際会議録
2. Environmental test bench for reliability studies: influence of the temperature on rf switches with metallic membranes
Lafontan, X. ; Le Touze, C. ; Wenk, B. ; Kolesnik, I. ; Pressecq, F. ; Perez, G. ; Nicot, J.-M. ; Dardalhon, M. ; Rigo, S.
出版情報: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.624-633,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4755
3.

国際会議録
国際会議録
3. Furnace oxynitridation in nitric oxide of thin silicon oxide: Atomic transport mechanisms and interfacial microstructure
Trimaille, I. ; Ganem, J-J. ; Gosset, L. G. ; Bailly, O. ; Rigo, S. ; Cantin, J-L. ; Bardeleben, H. J. von
出版情報: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.269-,  2000.  Warrendale, PA.  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 592
4.

国際会議録
国際会議録
4. X-ray Diffraction Characterization of Suspended Structures for MEMS Applications
Goudeau, P. ; Tamura, N. ; Lavelle, B. ; Rigo, S. ; Masri, T. ; Bosseboeuf, A. ; Sarnet, T. ; Petit, J. -A. ; Desmarres, J. -M.
出版情報: Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.121-126,  2005.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 875
5.

国際会議録
国際会議録
5. Atomic Transport During Thermal Nitridation of SiO2 Films in NH3 and During Subsequent Thermal Reoxidation
Baumvol, I.J.R. ; Breelle, E. ; Stedile, F.C. ; Ganem, J.-J. ; Trimaille, I. ; Rigo, S.
出版情報: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.97-108,  1996.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 96-1
6.

国際会議録
国際会議録
6. Mechanisms of Thermal Growth of Very Thin Films of SiO2 on Si(OO1) in Dry O2
Trimaille, I. ; Stedile, F.C. ; Ghanem, J.-J. ; Baumvol, I.J.R. ; Rigo, S.
出版情報: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.59-71,  1996.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 96-1