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Riemann, H. ; Luedge, A. ; Boettcher, K. ; Rost, H-J. ; Hallmann, B. ; Schroeder, W. ; Hensel, W. ; Schleusener, B.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.111-123, 1994. Pennington, NJ. Electrochemical Society
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.109-120, 1995. Pennington, NJ. Electrochemical Society
Wiedemann, B. ; Meyer, J.D. ; Alt, H.C, ; Riemann, H.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.83-87, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Wiedemann, B. ; Meyer, J.D. ; Alt, H.C. ; Riemann, H.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.83-87, 2003. Pennington, NJ. Electrochemical Society