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出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.280-287, 2005. Pennington, NJ. Electrochemical Society
Zhou, D. ; Sun, K. ; Garrigues, M. ; Leclercq, J.-L. ; Regreny, P. ; Peng, J. ; Viktorovitch, P.
出版情報:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.455-466, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Leclercq, J.-L. ; Regreny, P. ; Viktorovitch, P. ; Bakouboula, A. ; Benyattou, T. ; Sagnes, I. ; Saint-Girons, G. ; Meriadec, C. ; Mereuta, A.Z. ; Bouchoule, S. ; Plais, A. ; Jacquet, J.
出版情報:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.448-454, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering