Zhang, Y. ; Lucovsky, O. ; Rayner, G.B. ; Appel, G. ; Ade, H. ; Whitten, J.L.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.388-412, 2002. Pennington, NJ. Electrochemical Society
Zhang, Y. ; Lucovsky, O. ; Rayner, G.B. ; Appel, G. ; Ade, H. ; Whitten, J.L.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.388-412, 2002. Pennington, NJ. Electrochemical Society