1.

国際会議録
国際会議録
1. Resolution Enhancement Techniques for Optical Lithography
Poornima, P. ; Tripathy, S.K. ; Rao, Ramgopal ; Sharma, Dinesh
出版情報: Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001).  VOL-2  pp.1260-1262,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4746
2.

国際会議録
国際会議録
2. Reliability Issues of Ultra Thin Silicon Nitride (a-SiN:H) by Hot Wire CVD for Deep Sub-Micron CMOS Technologies
Waghmare, P.C. ; Patil, S.B. ; Kumbhar, A. ; Dusane, R.O. ; Rao, Ramgopal
出版情報: Proceedings of the Eleventh International Workshop on the Physics of Semiconductor Devices : (December 11-15, 2001).  VOL-2  pp.1418-1420,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4746