Cirelli, R. A. ; Bude, J. ; Mansfield, W. M. ; Timp, G. L. ; Klemens, F. P. ; Watson, C. P. ; Weber, G. R. ; Sweeney, J R. ; Houlihan, F. M. ; Gabor, A. H. ; Baumann, F. ; Buonanno, M. ; Forsyth, G. F. ; Barr, D. ; Lee, T. C. ; Rafferty, C. S. ; Hutton, R. S. ; Timko, A. G. ; Hergenrother, J. ; Reichmanis, E. ; Harriott, L. R. ; Hillenius, S. J. ; Nalamasu, O.
出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.295-305, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Mogi, Toshiharu K. ; Gossmann, H.-J. ; Rafferty, C. S. ; Luftman, H. S. ; Unterwald, F. C. ; Boone, T. ; Thompson, Michael O. ; Poate, J. M.
出版情報:
Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA. pp.157-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Pelaz, L. ; Gilmer, G. H. ; Jaraiz, M. ; Gossmann, H-J. ; Rafferty, C. S. ; Eaglesham, D. J. ; Poate, J. M.
出版情報:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.341-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Fiory, A. T. ; Bourdelle, K. K. ; Agarwal, A. ; Gossmann, H-J. ; Rafferty, C. S.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.31-, 1999. Warrendale, PA. MRS - Materials Research Society
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.123-, 1999. Warrendale, PA. MRS - Materials Research Society
Gossmann, H. J. ; Rafferty, C. S. ; Stolk, P. A. ; Eaglesham, D. J. ; Gilmer, G. H. ; Poate, J. M. ; Vuong, H.-H. ; Mogi, T. K. ; Thompson, M. O.
出版情報:
Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.3-, 1995. Pittsburgh. MRS - Materials Research Society