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シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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出版情報:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.63-68, 1997. Pennington, NJ. Electrochemical Society
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出版情報:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.413-424, 1994. Pennington, NJ. Electrochemical Society