Heitzinger, C. ; Sheikholeslanii, A. ; Puchner, H. ; Selberherr, S.
出版情報:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.356-368, 2003. Pennington, N.J.. Electrochemical Society
Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.239-249, 2004. Pennington, N.J.. Electrochemical Society
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.65-, 1999. Warrendale, PA. MRS - Materials Research Society