Jaraiz, Martin ; Pelaz, Lourdes ; Rubio, Emiliano ; Barbolla, Juan ; Gilmer, George H. ; Eaglesham, David J. ; Gossmann, Hans J. ; Poate, John M.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.43-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Albano, Maria A. ; Babaram, Vijay ; Poate, John M. ; Sosnowski, Marek ; Jacobson, Dale C.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B3.6-, 2001. Warrendale, PA. Materials Research Society
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