Fischer, W.-J. ; Koenig, P. ; Ploetner, M. ; Hermann, R. ; Stab, H.
出版情報:
Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia. pp.328-336, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering