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Real-time monitoring and control during MBE growth of GaAs/AIGaAs Bragg reflectors using multiwave ellipsometry

著者名:
Wagner,T. ( LOT-Oriel GmbH(FRG) )
Johs,B.D. ( J.A.Woollam Co.(USA) )
Herzinger,C.M. ( J.A.Woollam Co.(USA) )
He,P. ( J.A.Woollam Co.(USA) )
Pittal,S. ( J.A.Woollam Co.(USA) )
Woollam,J.A. ( J.A.Woollam Co.(USA) )
さらに 1 件
掲載資料名:
Polarimetry and ellipsometry : 20-23 May, 1996, Kazimierz Dolny, Poland
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3094
発行年:
1997
開始ページ:
301
終了ページ:
307
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425096 [0819425095]
言語:
英語
請求記号:
P63600/3094
資料種別:
国際会議録

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