1.

国際会議録
国際会議録
1. The Effect of Carbon/Self-Interstitial Clusters on Carbon Diffusion in Silicon Modeled by Kinetic Monte Carlo Simulations
Pinacho, Ruth ; Jaraiz, Martin ; Gossmann, Hans J. ; Gilmer, George H. ; Benton, Janet L. ; Werner, P.
出版情報: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B7.2-,  2001.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 610
2.

国際会議録
国際会議録
2. Effects Of Nonmelt Excimer Laser Annealing On 5keV Boron Implanted in Silicon
Jaraiz, Martin ; Castrillo, Pedro ; Pinacho, Ruth ; Pelaz, Lourdes ; Barbolla, Juan ; Gilmer, George H. ; Rafferty, Conor S.
出版情報: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B10.5-,  2001.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 610