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出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.126-137, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Stehle, J. L. ; Thomas, O. T. ; Piel, J. P. ; Evrard, P. ; Lecat, J. H. ; Hammond, L. C.
出版情報:
Polymer based molecular composites : symposium held November 27-30, 1989, Boston, Massachusetts, U.S.A.. pp.349-354, 1990. Pittsburgh, Pa.. Materials Research Society
Stehle, J. L. ; Piel, J. P. ; Campillo-Carreto, J.
出版情報:
Metrology, Inspection, and Process Control for Microlithography XX. pp.615233-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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