Sun, Y.-M. ; Lee, S.Y. ; Engbrecht, E.R. ; Pfeifer, K. ; Smith, S. ; White, J.M. ; Ekerdt, J.G.
出版情報:
Growth, evolution and properties of surfaces, thin films and self-organized structures : symposium held November 27-December 1, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.. pp.115-120, 2003. Warrendale, Pa.. Materials Research Society