Chong, Y.F. ; Pey, K.L. ; Wee, A.T.S. ; See, A. ; Tung, C.H. ; Lu, Y.F.
出版情報:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.311-320, 2001. Pennington, NJ. Electrochemical Society
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.645-650, 2002. Warrendale. Materials Research Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.141-146, 2004. Warrendale, Pa.. Materials Research Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.135-140, 2004. Warrendale, Pa.. Materials Research Society
Materials, technology and reliability of advanced interconnects - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.271-276, 2005. Warrendale, Pa.. Materials Research Society
Gan, C.L. ; Thompson, C.V. ; Pey, K.L. ; Choi, W.K. ; Wei, F. ; Yu, B. ; Hau-Riege, S.P.
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.431-438, 2002. Warrendale. Materials Research Society
Tan, W.L. ; Pey, K.L. ; Chooi, Simon Y.M. ; Ye, J.H.
出版情報:
Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2002. Warrendale, PA. Materials Research Society
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.373-378, 2004. Warrendale. Materials Research Society
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.339-344, 2004. Warrendale. Materials Research Society
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