Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.522-527, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.151-156, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Applications of photonic technology 3 : closing the gap between theory, development, and application. pp.986-991, 1998. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering