1.

国際会議録
国際会議録
1. Microscale effects of silicon-on-glass micromechanical devices: experimental results and 3D finite element modeling
Borovkov,A.I. ; Pyatishev,E.N. ; Lurie,M.S. ; Pereyaslavets,E.V. ; Lunev,V.P. ; Kazakin,A.N. ; Popova,I.V. ; Lestiev,A.M.
出版情報: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.  pp.361-368,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4348
2.

国際会議録
国際会議録
2. 3D finite element modeling of micromachined pressure sensor
Borovkov,A.I. ; Pyatishev,E.N. ; Lurie,M.S. ; Akulshin,Y.D. ; Pereyaslavets,E.V.
出版情報: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.  pp.338-347,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4348
3.

国際会議録
国際会議録
3. 3D finite element modeling of micromachined catheter with corrugated diaphragm
Borovkov,A.I. ; Pyatishev,E.N. ; Lurie,M.S. ; Akulshin,Y.D. ; Pereyaslavets,E.V.
出版情報: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.  pp.369-374,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4348