Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California. pp.167-174, 1998. Bellingham, Washington. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic Device and Multilevel Interconnection Technology II. pp.148-163, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering