Hill, F. ; Beckers, J. ; Brandt, P. ; Briggs, J. ; Brown, T. ; Brown, W. ; Collados, M. ; Denker, C. ; Fletcher, S. ; Hegwer, S. ; Horst, T. ; Komsa, M. ; Kuhn, J. ; Lecinski, A. ; Lin, H. ; Oncley, S. ; Penn, M. ; Rimmele, T. R. ; Socas-Navarro, H. ; Streander, K.
出版情報:
Ground-based telescopes : 21-25 June 2004, Glasgow, Scotland, United Kingdom. pp.122-129, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Liang, T. ; Stivers, A.R. ; Penn, M. ; Bald, D. ; Sethi, C. ; Boegli, V. ; Budach, M. ; Edinger, K. ; Spies, P.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XI. pp.291-300, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering