Jaraiz, Martin ; Castrillo, Pedro ; Pinacho, Ruth ; Pelaz, Lourdes ; Barbolla, Juan ; Gilmer, George H. ; Rafferty, Conor S.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B10.5-, 2001. Warrendale, PA. Materials Research Society
Jaraiz, Martin ; Pelaz, Lourdes ; Rubio, Emiliano ; Barbolla, Juan ; Gilmer, George H. ; Eaglesham, David J. ; Gossmann, Hans J. ; Poate, John M.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.43-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Pelaz, Lourdes ; Marques, Luis A. ; Lopez, Pedro ; Santos, Ivan ; Aboy, Maria ; Barbolla, Juan
出版情報:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.431-436, 2004. Warrendale, Pa.. Materials Research Society
Pelaz, Lourdes ; Marques, Luis A. ; Gilmer, George H. ; Barbolla, Juan
出版情報:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
Aboy, Maria ; Pelaz, Lourdes ; Marques, Luis A. ; Lopez, Pedro ; Barbolla, Juan
出版情報:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.307-312, 2004. Warrendale, Pa.. Materials Research Society
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