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Investigation of second-harmonic generation for SOI wafer metrology

著者名:
Pasternak, R.
Jun, B.
Schrimpf, R.D.
Fleetwood, D.M.
Alles, M.A.
Dolan, R.P.
Standley, R.W.
Tolk, N.H.
さらに 3 件
掲載資料名:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2005-03
発行年:
2005
開始ページ:
383
終了ページ:
388
総ページ数:
6
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774611 [1566774616]
言語:
英語
請求記号:
E23400/200503
資料種別:
国際会議録

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