1.

国際会議録
国際会議録
1. Selective Oxidation of Si in the Presence of W and WN
Lin, Boyang ; Hwang, Ming ; Lu, Jiong-Ping ; Hsu, Wei-Yung ; Pas, Mike ; Piccirillo, Joe ; Miner, Gary ; OConnor, Kathy ; Xing, Gary ; Lopes Dave
出版情報: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.359-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 525
2.

国際会議録
国際会議録
2. Effects of Hydrogen Annealing Process Conditions on Nano Scale Silicon (011) Fins
Zaman, Rownak J. ; Xiong, Weize ; Quintanilla, Rudy ; Schulz, Thomas ; Cleavelin, C. Rinn ; Wise, Rick ; Pas, Mike ; Patruno, Paul ; Schruefer, Klaus ; Banerjee, Sanjay K.
出版情報: Micro- and nanosystems - materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.37-42,  2005.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 872