Kittl, J. A. ; Prinslow, D. A. ; Apte, P. P. ; Pas, M. F.
出版情報:
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.269-, 1996. Pittsburgh. MRS - Materials Research Society
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.201-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.147-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Kittl, J. A. ; Hong, Q. Z. ; Yang, H. ; Yu, N. ; Rodder, M. ; Apte, P. P. ; Shiau, W. T. ; Chao, C. P. ; Breedijk, T. ; Pas, M. F.
出版情報:
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.331-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Kittl, J. A. ; Hong, Q. Z. ; Yang, H. ; Yu, N. ; Rodder, M. ; Apte, P. P. ; Shiau, W. T. ; Chao, C. P. ; Breedijk, T. ; Pas, M. F.
出版情報:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.255-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Kittl, J. A. ; Prinslow, D. A. ; Misium, G. ; Pas, M. F.
出版情報:
Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.175-, 1996. Pittsburgh, PA. MRS - Materials Research Society