1.

国際会議録
国際会議録
1. Effects of PECVD W-N diffusion barrier on thermal stress and electrical properties of Cu/W-N/SiOF multilevel interconnect
Kim,Y.T. ; Kim,D.J. ; Lee,S. ; Park,Y.K. ; Kim,I.-S. ; Park,J.-W.
出版情報: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.227-233,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3743
2.

国際会議録
国際会議録
2. Active vibration control of hybrid smart structures featuring piezoelectric films and electrorheological fluids
Choi,S.B. ; Park,Y.K. ; Cheong,C.C.
出版情報: Smart structures and materials 1996 : smart structures and integrated systems.  pp.544-552,  1996.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2717
3.

国際会議録
国際会議録
3. Improvement in diffusion barrier properties of PECVD W-N thin film by low-energy BF2+ implantation
Kim,D.J. ; Kim,Y.T. ; Park,Y.K. ; Sim,H.S. ; Park,J.-W.
出版情報: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.324-331,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3743
4.

国際会議録
国際会議録
4. High-speed integrated electroabsorption modulators
Johnson,J.E. ; Morton,P.A. ; Park,Y.K. ; Ketelsen,L.J.P. ; Grenko,J.A. ; Miller,T.J. ; Sputz,S.K. ; Tanbun-Ek,T. ; Vandenberg,J.M. ; Yadvish,R.D. ; Fullowan,T.R. ; Sciortino,P.F.,Jr. ; Sergent,A.M. ; Tsang,W.T.
出版情報: High-Speed Semiconductor Lasers for Communication.  pp.30-38,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3038
5.

国際会議録
国際会議録
5. Shape control of an electrorheological fluid-based smart plate
Park,Y.K. ; Choi,S.B. ; Jung,S.B.
出版情報: Smart Structures and Materials 1998: Smart Structures and Integrated Systems.  Part 2  pp.824-835,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3329