1.

国際会議録
国際会議録
1. TuD7:Rewritable optical disk with a new addressing method for increasing recording density and random accessibility
Suh,S.-W. ; Kim,D.-Y. ; Jong,I.-Y. ; Park,J.-W. ; Kim,J.-Y.
出版情報: ISOM/ODS '99 : joint international symposium on Optical Memory and Optical Data Strage 1999, 11-15 July 1999 Sheraton Kauai Resort, Koloa, Howaii.  pp.127-129,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3864
2.

国際会議録
国際会議録
2. Effects of PECVD W-N diffusion barrier on thermal stress and electrical properties of Cu/W-N/SiOF multilevel interconnect
Kim,Y.T. ; Kim,D.J. ; Lee,S. ; Park,Y.K. ; Kim,I.-S. ; Park,J.-W.
出版情報: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.227-233,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3743
3.

国際会議録
国際会議録
3. TuD3:Crystallization behavior of sputter-deposited nitrogen-doped amorphous Ge2Sb2Te5 thin films
Seo,H. ; Jeong,T.-H. ; Park,J.-W. ; Yeon,C. ; Lee,D.-C. ; Kim,S.-J. ; Lim,H.-J. ; Kim,S.-Y.
出版情報: ISOM/ODS '99 : joint international symposium on Optical Memory and Optical Data Strage 1999, 11-15 July 1999 Sheraton Kauai Resort, Koloa, Howaii.  pp.116-118,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3864
4.

国際会議録
国際会議録
4. Improvement in diffusion barrier properties of PECVD W-N thin film by low-energy BF2+ implantation
Kim,D.J. ; Kim,Y.T. ; Park,Y.K. ; Sim,H.S. ; Park,J.-W.
出版情報: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.324-331,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3743
5.

国際会議録
国際会議録
5. TuD11:Suppression of jitter bump for GeSbTe phase-change optical disk
Jeong,T.-H. ; Seo,H. ; Yeon,C. ; Park,J.-W. ; Lee,D.-C.
出版情報: ISOM/ODS '99 : joint international symposium on Optical Memory and Optical Data Strage 1999, 11-15 July 1999 Sheraton Kauai Resort, Koloa, Howaii.  pp.139-141,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3864
6.

国際会議録
国際会議録
6. Simultaneous strain and failure sensing of composite beam using an embedded fiber optic extrinsic Fabry-Perot sensor
Hong,C.-S. ; Kim,C.-G. ; Kwon,I.-B. ; Park,J.-W.
出版情報: Smart structures and materials 1996 : Smart sensing, processing and instrumentation : 26-28 February 1996, San Diego, California.  PartA  pp.122-133,  1996.  Bellingham.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2718
7.

国際会議録
国際会議録
7. Thermal stability of PECVD W-B-N thin film as a diffusion barrier
Kim,Y.T. ; Kim,D.J. ; Lee,C.W. ; Park,J.-W.
出版情報: Multilevel Interconnect Technology.  pp.48-56,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3214
8.

国際会議録
国際会議録
8. Investigation of electron beam stabilization of 193-nm photoresists
Kim,M.-S. ; Park,J.-W. ; Kim,H.-J. ; Jun,B.-J. ; Gil,M.-G. ; Kim,B.-H. ; Ross,M.F. ; Livesay,W.R.
出版情報: Advances in Resist Technology and Processing XVIII.  4345  pp.737-750,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4345