Eom, Dae-Hong ; Kim, Sang-Yong ; Lee, Kang-Kuk ; Kim, Ki-Sub ; Song, Hyung-Soo ; Park, Jin-Goo
出版情報:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.288-295, 1999. Pennington, NJ. Electrochemical Society
Lee, Sang-Ho ; Kwon, Myong-Jong ; Park, Jin-Goo ; Kim, Yong-Kweon ; Shin, Hyung-Jae
出版情報:
Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.. pp.143-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Park, Jin-Goo ; Han, Jeung-Hoon ; Kim, Seung-Hwan ; Lee, Sang-Ho
出版情報:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.513-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Kim, In-Kwon ; Kang, Young-Jae ; Hong, Yi-Koan ; Park, Jin-Goo
出版情報:
Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.3-8, 2005. Warrendale, Pa.. Materials Research Society
Lee, Jin-Hyung ; Lim, Hyun-Woo ; Park, Jin-Goo ; Lee, Euu-Kyu ; Kim, Yangsun
出版情報:
Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A.. pp.247-252, 2004. Warrendale, Pa.. Materials Research Society
Kim, Nam-Kyun ; Kim, Tae-Gon ; Park, Jin-Goo ; Kim, Woon-Bae ; Shin, Hyung-Jae
出版情報:
Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A.. pp.259-266, 2004. Warrendale, Pa.. Materials Research Society
Optical microstructural characterization of semiconductors : sympoisum held November 29-30, 1999, Boston, Massachusetts, U.S.A.. pp.297-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.123-128, 2005. Warrendale, Pa.. Materials Research Society
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