Pang, Zhengda ; Boumerzoug, Mohamed ; Kruzelecky, V. ; Mascher, Peter ; Simmons, John G.
出版情報:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.561-568, 1992. Pittsburgh, Pa.. Materials Research Society
Pang, Zhengda ; Boumerzoug, Mohamed ; Mascher, Peter ; Simmons, John G.
出版情報:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.343-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
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