Reliability and Stability of Thin-Film Amorphous Silicon MEMS on Glass Substrates
- 著者名:
- 掲載資料名:
- Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 1299
- 発行年:
- 2011
- 開始ページ:
- 85
- 終了ページ:
- 90
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605112763 [1605112763]
- 言語:
- 英語
- 請求記号:
- M23500/1299
- 資料種別:
- 国際会議録
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