Lee, B. ; Gan, T. ; Boning, D.S. ; David, J. ; Bonner, B.A. ; McKeever, P. ; Osterheld, T.H.
出版情報:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D11.8/E8.8-, 2001. Warrendale, PA. Materials Research Society
Bonner, B.A. ; Fishkin, B. ; David, J. ; Garretson, C. ; Osterheld, T.H.
出版情報:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D11.6/E8.6-, 2001. Warrendale, PA. Materials Research Society
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.393-400, 1995. Pennington, NJ. Electrochemical Society
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