Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing. pp.173-180, 1998. Pennington, N. J.. Electrochemical Society
Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing. pp.139-144, 1998. Pennington, N. J.. Electrochemical Society
Osseo-Asare, K. ; Fuerstenau, D. W. ; Ottewill, R. H.
出版情報:
Adsorption at interfaces : papers from a symposium honoring Robert D. Vold and Marjorie J. Vold sponsored by the Division of Colloid and Surface Chemistry at the 167th meeting of the American Chemical Society, Los Angeles, Calif., April 2-5, 1974. pp.63-78, 1975. Washington. American Chemical Society
Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium. pp.354-362, 1999. Pennington, N. J.. Electrochemical Society
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