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出版情報:
Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993. pp.146-157, 1993. Pennington, NJ. Electrochemical Society
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出版情報:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.571-586, 1997. Pennington, NJ. Electrochemical Society
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出版情報:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.587-600, 1997. Pennington, NJ. Electrochemical Society
Osburn, C.M. ; Tsai, J.Y. ; Wang, Q.F. ; Rose, J. ; Cowen, A.
出版情報:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.576-591, 1993. Pennington, NJ. Electrochemical Society
Kim, I. ; Han, S.K. ; Kiether, W. ; Lee, S.J. ; Lee, C.H. ; Luan, H.F. ; Luo, Z. ; Rying, E. ; Wicaksana, Z.Wang D. ; Zhu, W. ; Hauser, J. ; Kiingon, A. ; Kwang, D.L. ; Ma, T.P. ; Maria, J.P. ; Misra, V. ; Osburn, C.M.
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Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.211-220, 2001. Pennington, NJ. Electrochemical Society
Layered structures : heteroepitaxy, superlattices, strain, and metastability : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.299-306, 1990. Pittsburgh, Pa.. Materials Research Society
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