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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.328-335, 1997. Pennington, NJ. Electrochemical Society
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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.291-298, 1997. Pennington, NJ. Electrochemical Society
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Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.245-, 1998. Warrendale, Pa. MRS - Materials Research Society
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Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy. pp.237-240, 2005. Uetikon-Zuerich. Trans Tech Publications
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Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.279-282, 2002. Zuerich, Switzerland. Trans Tech Publications
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出版情報:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.279-282, 2002. Zuerich, Switzerland. Trans Tech Publications
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.331-334, 2002. Zuerich, Switzerland. Trans Tech Publications
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