Erickson, J.W. ; Brock, R. ; Killian, A. ; Johnston, G. ; Trotter, D. ; Nouri, F.
出版情報:
Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium. pp.155-166, 1999. Pennington, New Jersey. Electrochemical Society
Rubin, M. E. ; Saha, S. ; Lutze, J. ; Nouri, F. ; Scott, G. ; Pramanik, D.
出版情報:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.213-, 1999. Warrendale, PA. MRS - Materials Research Society
Rothschild, A. ; Kraus, P.A. ; Chua, T.C. ; Nouri, F. ; Cubaynes, F.N. ; Veloso, A. ; Mertens, S. ; Date, L. ; Schreutelkamp, R. ; Schaekers, M.
出版情報:
Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.. pp.49-56, 2004. Warrendale, Pa.. Materials Research Society
Felch, S. B. ; Food, M. A. ; Olsen, C. ; Nouri, F. ; Matsunaga, Y. ; Natsuaki, N.
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.83-90, 2005. Pennington, NJ. Electrochemical Society
Washington, L. ; Nouri, F. ; Verheyen, P. ; Moroz, V. ; Kawaguchi, M. ; Kim, Y. ; Samoilov, A. ; Jurczak, M.
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.515-522, 2005. Pennington, NJ. Electrochemical Society
Higashi, G. ; Kraus, P. ; Chua, T.C. ; Olsen, C. ; Ahmed, K. ; Nouri, F. ; Kher, S.S. ; Sharangpani, R. ; Deaton, P. ; Ulloa, E.J. ; Tevatia, G. ; Narwankar, P.K.
出版情報:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.271-277, 2004. Pennington, NJ. Electrochemical Society