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出版情報:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.165-172, 1999. Pennington, NJ. Electrochemical Society
Lauerhaas, J. ; Wu, Y. ; Xu, K. ; Vereecke, G. ; Vos, R. ; Kenis, K. ; Mertens, P. ; Nicolosi, T. ; Heyns, M.
出版情報:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.147-155, 2001. Pennington, N.J.. Electrochemical Society