Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.505-512, 1986. Pittsburgh, Pa.. Materials Research Society
Dori, L. ; Arienzo, M. ; Sun, Y.C. ; Nguyen, T.N. ; Wetzel, J.
出版情報:
Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.. pp.259-264, 1987. Pittsburgh, Pa.. Materials Research Society
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.. pp.327-332, 1985. Pittsburgh, Pa.. Materials Research Society
Image processing : algorithms and systems II : 21-23 January 2003, Santa Clara, California, USA. pp.248-257, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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