Whole-Wafer Optical Mapping of Defects in Insulating Silicon Carbide Wafers
- 著者名:
Mier, Millard G. Boeckl, John J. Hill, David A. Bertrand, Scott D. Ramakrishnan, Easwar Roth, Matthew D. Balkas, Cengiz Nelson, Matthew P. - 掲載資料名:
- Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 742
- 発行年:
- 2003
- 開始ページ:
- 127
- 終了ページ:
- 130
- 総ページ数:
- 4
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996793 [1558996796]
- 言語:
- 英語
- 請求記号:
- M23500/742
- 資料種別:
- 国際会議録
類似資料:
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Materials Research Society |
Trans Tech Publications |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Trans Tech Publications |
American Institute of Chemical Engineers |
Trans Tech Publications |
SPIE - The International Society of Optical Engineering |