Eco-materials processing & design : ISEPD-4, proceedings of the 4th International Symposium on Eco-Materials Processing & Design, Gyungpodae, Korea, February 4-6, 2003. pp.271-276, 2003. Zuerich, Switzerland. Trans Tech Publications
Cho, J.S. ; Baek, S.H. ; Nam, K.H. ; Cho, H.J. ; Courboin, D. ; Jeong, S.H. ; Lee, I.S. ; Shin, C. ; Kim, H.S.
出版情報:
Photomask and Next-Generation Lithography Mask Technology IX. pp.205-216, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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