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出版情報:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.1545-1548, 2006. Stafa-Zuerich. Trans Tech Publications
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出版情報:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.205-213, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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出版情報:
Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.364-369, 1998. Pennington, NJ. Electrochemical Society
Yokoi, H. ; Mizumoto, T. ; Shimizu, M. ; Waniishi, T. ; Futakuchi, N. ; Kaida, N. ; Nakano, Y.
出版情報:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.311-317, 1999. Pennington, N.J.. Electrochemical Society
Sugiyama, M. ; Shimogaki, Y. ; Sudo, S. ; Nakano, Y. ; Sugawara, K. ; Tada, K. ; Komiyama, H.
出版情報:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.909-916, 1997. Pennington, NJ. Electrochemical Society
Li, N. ; Waki, I. ; Kumtornkittikul, C. ; Liang, J.-H. ; Sugiyama, M. ; Shimogaki, Y. ; Nakano, Y.
出版情報:
State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia. pp.270-275, 2004. Pennington, N.J.. Electrochemical Society
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出版情報:
Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.. pp.143-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
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