Nishimura, A. ; Minehara, E. ; Tsukada, T. ; Kikuchi, M. ; Nakano, J.
出版情報:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.673-677, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Shiozski, K. ; Okasaka, K. ; Nakano, J. ; Kolde, H.
出版情報:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.163-169, 1994. Pennington, NJ. Electrochemical Society