Adan, A.O. ; Naka, T. ; Ueda, T. ; Seguchi, Y. ; Kagisawa, A.
出版情報:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.340-351, 1997. Pennington, NJ. Electrochemical Society
Maa, J. S. ; Tweet, D. J. ; Lee, J. J. ; Hsu, S. T. ; Fujii, K. ; Naka, T. ; Ueda, T. ; Baba, T. ; Awaya, N. ; Sakiyama, K.
出版情報:
Intergration of heterogeneous thin-film materials and devices : symposium held April 23-24, 2003, San Francisco, California, U.S.A.. pp.3-8, 2003. Warrendale, PA. Materials Research Society
Maa, J. S. ; Tweet, D. J. ; Lee, J. J. ; Hsu, S. T. ; Fujii, K. ; Naka, T. ; Ueda, T. ; Baba, T. ; Awaya, N. ; Sakiyama, K.
出版情報:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.135-140, 2003. Warrendale, Pa.. Materials Research Society