Sekine, A. ; Nagahama, H. ; Tojo, T. ; Akeno, K. ; Hirano, R.
出版情報:
Optomechatronic systems III : 12-14 November 2002, Stuttgart, Germany. pp.624-631, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Wickramanayaka, S. ; Nagahama, H. ; Watanabe, E. ; Hayashi, T. ; Sato, M. ; Nakagawa, Y. ; Hasegawa, S. ; Mizuno, S. ; Numasawa, Y.
出版情報:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.. pp.D6.3-, 2001. Warrendale, PA. Materials Research Society
THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain. pp.3563-3568, 2003. Zuerich-Uetikon, Switzerland. Trans Tech Publications