1.

国際会議録
国際会議録
1. Monte Carlo simulation for CD SEM calibration and algorithm development
M.P. Davidson ; N.T. Sullivan
出版情報: Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California.  pp.334-345,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2439
2.

国際会議録
国際会議録
2. SEM review of unpatterned particle monitor wafers
S. Arsenault ; N.T. Sullivan
出版情報: Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California.  pp.158-163,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2439
3.

国際会議録
国際会議録
3. Comparison of state-of-the-art DUV lenses
T.K. Lindsay ; N.T. Sullivan ; S.K. Dass ; G.W. Pollard ; B. Jones
出版情報: Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California.  pp.678-689,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2440