1.

国際会議録
国際会議録
1. INVITED: 50 nm VERTICAL REPLACEMENT-GATE (VRG) nMOSFETS WITH ALD HfO2 GATE DIELECTRICS
Hergenrother, J.M. ; Nigani, T. ; Wilk, O.D. ; Klemens, F.P. ; Monroe, D. ; Sorsch, T.W. ; Busch, B. ; Green, M.L. ; Muller, D.A. ; Voyles, P.M. ; Grazul, J.L. ; Shero, E.J. ; Givens, M.E. ; Pomarede, C. ; Mazanecand, M. ; Werkhoven, C.
出版情報: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.929-942,  2002.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2002-2
2.

国際会議録
国際会議録
2. INVITED: 50 nm VERTICAL REPLACEMENT-GATE (VRG) nMOSFETS WITH ALD HfO2 GATE DIELECTRICS
Hergenrother, J.M. ; Nigani, T. ; Wilk, O.D. ; Klemens, F.P. ; Monroe, D. ; Sorsch, T.W. ; Busch, B. ; Green, M.L. ; Muller, D.A. ; Voyles, P.M. ; Grazul, J.L. ; Shero, E.J. ; Givens, M.E. ; Pomarede, C. ; Werkhoven, M.Mazanecand C.
出版情報: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.929-942,  2002.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2002-2
3.

国際会議録
国際会議録
3. STRUCTURAL MODELS OF NEGATIVELY CURVED GRAPHITIC CARBON
Townsend, S.J. ; Lenosky, T.J. ; Muller, D.A. ; Nichols, C.S. ; Elser, V.
出版情報: Novel forms of carbon : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.229-234,  1992.  Pittsburgh.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 270
4.

国際会議録
国際会議録
4. High Performance, Highly Reliable Gate Oxide Formed with Rapid Thermal Oxidation In-Situ Steam Generation (ISSG) Technique
Ma, Y. ; Chen, Y.N. ; Brown, M.M ; Li, F. ; Chen, Y. ; Eng, J., Jr. ; Opila, R.L. ; Chabal, Y.J. ; Sapjeta, J. ; Muller, D.A. ; Xing, G.C. ; Trowbridge, T. ; Khau, M. ; Tam, N.
出版情報: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.179-186,  2000.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-9