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Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope

著者名:
Hofmann,U. ( Fraunhofer Institute for Silicon Technology )
Muehlmann,S.
Witt,M.
Dorschel,K.
Schutz,R.
Wagner,B.
さらに 1 件
掲載資料名:
Miniaturized Systems with Micro-Optics and MEMS
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3878
発行年:
1999
開始ページ:
29
終了ページ:
38
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434753 [0819434752]
言語:
英語
請求記号:
P63600/3878
資料種別:
国際会議録

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