Moudgil, B. ; Park, C-W. ; Singh, R. ; Sohn, I. S.
出版情報:
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.181-186, 2000. Warrendale, PA. Materials Research Society
Abiade, J.T. ; Yeruva, S. ; Moudgil, B. ; Kumar, D. ; Singh, R.K.
出版情報:
Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.69-74, 2005. Warrendale, Pa.. Materials Research Society
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